Document Type

Conference Proceeding

Publisher

Bloomsbury Publishing India Pvt. Ltd

Faculty

Faculty of Computing, Health and Science

School

Electron Science Research Institute

RAS ID

14277

Comments

This article was originally published as: Sridhar, M., Maurya, D. , Friend, J., Yeo , L., & Alameh, K. (2012). Microfluidic Channel Fabrication in Lithium Niobate using Focused Ion Beam. Proceedings of International Symposium on Macro- and Supramolecular Architecture and Materials MAM-2012. (pp. 103-108). Coimbatore, India. Bloomsbury Publishing India Pvt. Ltd.

Abstract

Microfluidic channels are fabricated in lithium niobate (LN) by Focused Ion Beam (FIB) milling. 127.68° axis rotated Y-cut (SAW grade) and Z-cut LN wafers are used. Material removal rate is 0.34±0.02 µm3/nC for Y-cut sample and 0.30 ± 0.02µm/nC for Z-cut sample. Experimental results show that the material removal rate decreases at high ion doses and high aspect ratios due to the increased significance of material deposition at these conditions. We also demonstrate the suitability of FIB-milled nanochannels for micro/nanofluidic applications.

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Engineering Commons

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