Document Type
Conference Proceeding
Publisher
Bloomsbury Publishing India Pvt. Ltd
Faculty
Faculty of Computing, Health and Science
School
Electron Science Research Institute
RAS ID
14277
Abstract
Microfluidic channels are fabricated in lithium niobate (LN) by Focused Ion Beam (FIB) milling. 127.68° axis rotated Y-cut (SAW grade) and Z-cut LN wafers are used. Material removal rate is 0.34±0.02 µm3/nC for Y-cut sample and 0.30 ± 0.02µm/nC for Z-cut sample. Experimental results show that the material removal rate decreases at high ion doses and high aspect ratios due to the increased significance of material deposition at these conditions. We also demonstrate the suitability of FIB-milled nanochannels for micro/nanofluidic applications.
Access Rights
free_to_read
Comments
Sridhar, M., Maurya, D. , Friend, J., Yeo , L., & Alameh, K. (2012). Microfluidic Channel Fabrication in Lithium Niobate using Focused Ion Beam. Proceedings of International Symposium on Macro- and Supramolecular Architecture and Materials MAM-2012. (pp. 103-108). Coimbatore, India. Bloomsbury Publishing India Pvt. Ltd.