Abstract
The influence of the Ar/O2 gas ratio during radio frequency (RF) sputtering of the RuO2 sensing electrode on the pH sensing performance is investigated. The developed pH sensor consists in an RF sputtered ruthenium oxide thin-film sensing electrode, in conjunction with an electroplated Ag/AgCl reference electrode. The performance and characterization of the developed pH sensors in terms of sensitivity, response time, stability, reversibility, and hysteresis are investigated. Experimental results show that the pH sensor exhibits super-Nernstian slopes in the range of 64.33-73.83 mV/pH for Ar/O2 gas ratio between 10/0-7/3. In particular, the best pH sensing performance, in terms of sensitivity, response time, reversibility and hysteresis, is achieved when the Ar/O2 gas ratio is 8/2, at which a high sensitivity, a low hysteresis and a short response time are attained simultaneously.
Document Type
Journal Article
Date of Publication
2015
Publisher
MDPI AG
School
Electron Science Research Institute
RAS ID
19415
Creative Commons License
This work is licensed under a Creative Commons Attribution 4.0 License.
Included in
Electrical and Electronics Commons, Materials Science and Engineering Commons, Nanoscience and Nanotechnology Commons
Comments
Sardarinejad, A., Maurya, D.K., Alameh, K. (2015). The pH sensing properties of RF sputtered RuO2 thin-film prepared using different Ar/O2 flow ratio in Materials, 8(6), 3352-3363. Available here.