Document Type

Journal Article

Publisher

MDPI

Faculty

Faculty of Health, Engineering and Science

School

Faculty of Health, Engineering and Science/Electron Science Research Institute

RAS ID

18464

Comments

This article was originally published as: Maurya, D. , Sardarinejad, A. , & Alameh, K. (2014). Recent Developments in R.F. Magnetron Sputtered Thin Films for pH Sensing Applications - An Overview. Coatings, 4(4), 756-771. Original article available here

Abstract

pH sensors are widely used in chemical and biological applications. Metal oxides-based pH sensors have many attractive features including insolubility, stability, mechanical strength, electrocatalyst and manufacturing technology. Various metal oxide thin films prepared by radio frequency (R.F.) magnetron sputtering have attractive features, including high pH sensitivity, fast response, high resolution, good stability and reversibility as well as potential for measuring pH under conditions that are not favourable for the commonly used glass electrodes-based pH sensors. In addition, thin film pH sensors prepared by R.F. magnetron sputtering offer many advantages, such as ease of packaging, low cost through the use of standard microfabrication processes, iniaturisation, capability of measuring pH at high temperatures, ruggedness and disposability. In this paper, recent development of R.F. magnetron sputtered thin films for pH sensing applications are reviewed.

DOI

10.3390/coatings4040756

Creative Commons License

Creative Commons Attribution 4.0 License
This work is licensed under a Creative Commons Attribution 4.0 License.

Included in

Engineering Commons

Share

 
COinS