Temperature effects on the performance of RuO2 thin-film pH sensor
Document Type
Journal Article
Publisher
Elsevier
Faculty
Faculty of Health, Engineering and Science
School
School of Engineering
RAS ID
19542
Abstract
A miniaturized pH sensor structure employing an R.F. sputtered ruthenium oxide sensing thin-film electrode in conjunction with an electroplated Ag/AgCl reference electrode is developed and the effect of the temperature of the pH test solution on the performance of the sensor is investigated. Experimental results show that the pH sensor employing 300 nm thick RuO2 sensing electrode exhibits Nernstian slopes of 65.66 mV/pH, 69.16 mV/pH, 72.50 mV/pH, 78.50 mV/pH and 84.50 mV/pH for pH test solution temperatures of 1.5 °C, 12 °C, 22 °C, 37 °C and 50 °C, respectively. The performance of the pH sensor in terms of sensitivity, response time, stability and reversibility is experimentally evaluated.
DOI
10.1016/j.sna.2015.07.027
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Comments
Sardarinejad, A., Maurya, D. K., Khaled, M., & Alameh, K. (2015). Temperature effects on the performance of RuO2 thin-film pH sensor. Sensors and Actuators A: Physical, 233, 414-421. Available here