Temperature effects on the performance of RuO2 thin-film pH sensor

Document Type

Journal Article

Publisher

Elsevier

Faculty

Faculty of Health, Engineering and Science

School

School of Engineering

RAS ID

19542

Comments

Sardarinejad, A., Maurya, D. K., Khaled, M., & Alameh, K. (2015). Temperature effects on the performance of RuO2 thin-film pH sensor. Sensors and Actuators A: Physical, 233, 414-421. Available here

Abstract

A miniaturized pH sensor structure employing an R.F. sputtered ruthenium oxide sensing thin-film electrode in conjunction with an electroplated Ag/AgCl reference electrode is developed and the effect of the temperature of the pH test solution on the performance of the sensor is investigated. Experimental results show that the pH sensor employing 300 nm thick RuO2 sensing electrode exhibits Nernstian slopes of 65.66 mV/pH, 69.16 mV/pH, 72.50 mV/pH, 78.50 mV/pH and 84.50 mV/pH for pH test solution temperatures of 1.5 °C, 12 °C, 22 °C, 37 °C and 50 °C, respectively. The performance of the pH sensor in terms of sensitivity, response time, stability and reversibility is experimentally evaluated.

DOI

10.1016/j.sna.2015.07.027

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