Bloomsbury Publishing India Pvt. Ltd
Faculty of Computing, Health and Science
Electron Science Research Institute
Microfluidic channels are fabricated in lithium niobate (LN) by Focused Ion Beam (FIB) milling. 127.68° axis rotated Y-cut (SAW grade) and Z-cut LN wafers are used. Material removal rate is 0.34±0.02 µm3/nC for Y-cut sample and 0.30 ± 0.02µm/nC for Z-cut sample. Experimental results show that the material removal rate decreases at high ion doses and high aspect ratios due to the increased significance of material deposition at these conditions. We also demonstrate the suitability of FIB-milled nanochannels for micro/nanofluidic applications.