Recent Developments in R.F. Magnetron Sputtered Thin Films For pH Sensing Applications - An Overview
Document Type
Journal Article
Publisher
MDPI
Faculty
Faculty of Health, Engineering and Science
School
Electron Science Research Institute
RAS ID
18464
Abstract
pH sensors are widely used in chemical and biological applications. Metal oxides-based pH sensors have many attractive features including insolubility, stability, mechanical strength, electrocatalyst and manufacturing technology. Various metal oxide thin films prepared by radio frequency (R.F.) magnetron sputtering have attractive features, including high pH sensitivity, fast response, high resolution, good stability and reversibility as well as potential for measuring pH under conditions that are not favourable for the commonly used glass electrodes-based pH sensors. In addition, thin film pH sensors prepared by R.F. magnetron sputtering offer many advantages, such as ease of packaging, low cost through the use of standard microfabrication processes, iniaturisation, capability of measuring pH at high temperatures, ruggedness and disposability. In this paper, recent development of R.F. magnetron sputtered thin films for pH sensing applications are reviewed.
DOI
10.3390/coatings4040756
Creative Commons License
This work is licensed under a Creative Commons Attribution 4.0 License.
Comments
Maurya, D. , Sardarinejad, A. , & Alameh, K. (2014). Recent Developments in R.F. Magnetron Sputtered Thin Films for pH Sensing Applications - An Overview. Coatings, 4(4), 756-771. Available here