High-sensitivity pH sensor employing a sub-micron ruthenium oxide thin-film in conjunction with a thick reference electrode
Document Type
Journal Article
Keywords
[RSTDPub], pH sensor Water quality, R.F. sputtering, Ruthenium oxideAlumina substrates, High-sensitivity, Nernstian response, R.f. sputtering, Reference electrodes, Ruthenium oxide, Sensing electrode, Sputtering target, Alumina, Magnetrons, pH, pH sensors, Ruthenium alloys, Water quality, Ruthenium compounds
Publisher
Elsevier
Faculty
Faculty of Health, Engineering and Science
School
School of Engineering / Electron Science Research Institute
RAS ID
16256
Abstract
We demonstrate the feasibility of developing a low-cost, rugged, miniaturized ruthenium oxide (RuO2) thin-film pH sensor comprising a RuO2 on platinum sensing electrode deposited using R.F. magnetron sputtered in conjunction with an integrated thick Ag/AgCl reference electrode. A RuO2 thin-film (300 nm) is deposited on an alumina substrate using R. F. magnetron sputtering with a RuO2 sputtering target in Argon plasma. Experimental results show a linear pH sensitivity of 58.50 mV/pH when the developed sensor is immersed in a standard buffer solution having pH values of 4.0 and 10.0 and lab supply water of pH 7.7 at a temperature of 22 C. These results are in excellent agreement with the theoretical Nernstian response of 58.56 mV/pH at 22 C.
Comments
Maurya, D. , Sardarinejad, A. , & Alameh, K. (2013). High-sensitivity pH sensor employing a sub-micron ruthenium oxide thin-film in conjunction with a thick reference electrode. Sensors and Actuators A: Physical, 203, 300-303. Available here